Patterned Polymer Multilayers as Etch Resists
W. T. Huck, L. Yan, A. Stroock, R. Haag, G. M. Whitesides – 1999
Title
15. Patterned Polymer Multilayers as Etch Resists
Author
W. T. Huck, L. Yan, A. Stroock, R. Haag, G. M. Whitesides
Date
1999
Identifier
DOI: 10.1021/la990374+
Source(s)
Citation
Langmuir, 1999, 15, 6862 - 6867
Type
Text